Onto Innovation Inc. (ONTO)

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Institutional Investors' Holdings

Filing Period:

No.	Name	Shares	Value	% Port
1.	Blackrock, Inc.	5,534,265	$1,134,911,826	0.02%
2.	Vanguard Portfolio Management Llc	2,743,019	$562,510,906	0.02%
3.	Vanguard Capital Management Llc	2,222,852	$455,840,260	0.01%
4.	State Street Corp	1,499,684	$307,625,917	0.01%
5.	Geode Capital Management, Llc	1,211,014	$248,389,818	0.02%