Axcelis Technologies Inc (ACLS)

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Institutional Investors' Holdings

Filing Period:

No.	Name	Shares	Value	% Port
1.	Blackrock Inc.	6,088,685	$789,641,559	0.02%
2.	Vanguard Group Inc	4,040,912	$524,065,877	0.01%
3.	State Street Corp	1,195,470	$155,040,504	0%
4.	Primecap Management Co	1,042,046	$135,142,946	0.1%
5.	Geode Capital Management, Llc	776,571	$100,804,422	0.01%