Axcelis Technologies Inc (ACLS)

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Institutional Investors' Holdings

Filing Period: Filing is Ongoing

No.	Name	Shares	Value	% Port
1.	Reinhart Partners, Inc.	1,518,544	$105,828,276	3.61%
2.	Btim Corp.	845,911	$58,951,537	0.42%
3.	Bank Of New York Mellon Corp	226,063	$15,754,317	0%
4.	Qsm Asset Management Ltd	60,416	$4,222,474	3.89%
5.	Mizuho Markets Cayman Lp	42,420	$2,956,250	0.21%