Amtech Systems Inc (ASYS)

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Institutional Investors' Holdings

Filing Period:

No.	Name	Shares	Value	% Port
1.	Dimensional Fund Advisors Lp	927,626	$4,480,769	0%
2.	Vanguard Group Inc	670,784	$3,239,887	0%
3.	Pacific Ridge Capital Partners, Llc	621,035	$2,999,599	0.79%
4.	Geode Capital Management, Llc	136,510	$659,519	0%
5.	Blackrock, Inc.	119,971	$579,460	0%