Entegris Inc (ENTG)

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Institutional Investors' Holdings

Filing Period:

No.	Name	Shares	Value	% Port
1.	Blackrock, Inc.	20,449,864	$1,788,954,067	0.04%
2.	Vanguard Group Inc	15,553,199	$1,360,593,849	0.02%
3.	State Street Corp	5,176,911	$452,876,174	0.02%
4.	Principal Financial Group Inc	5,014,198	$438,642,101	0.25%
5.	Jpmorgan Chase & Co	4,163,372	$364,211,841	0.03%