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Filing Details

Issuer

Cik	Name	Symbol	Sector (SIC)	IRS No
1113232	Axcelis Technologies Inc	ACLS	Special Industry Machinery, Nec (3559)	341818596

Insiders

Cik	Name	Reported Address	Insider Title	Director	Officer	Large Shareholder	Other
1314443	P Matthew Flynn	C/O Axcelis Technologies, Inc. 108 Cherry Hill Drive Beverly MA 01915	Evp, Customer Operations	No	Yes	No	No

Reported Non-Derivative Transactions

Sec. Name	Acquisiton - Disposition	Date	Amount	Price	Remaning Holdings	Equity Swap Involved	Form Type	Code	Nature of Ownership
Common Stock	Acquisiton	2010-12-09	15,000	$1.16	122,135	No	4	M	Direct
Common Stock	Disposition	2010-12-09	3,400	$3.11	118,735	No	4	S	Direct
Common Stock	Disposition	2010-12-09	11,600	$3.11	107,135	No	4	S	Direct

Equity Swap Involved	Form Type	Code	Nature of Ownership
No	4	M	Direct
No	4	S	Direct
No	4	S	Direct

Reported Derivative Transactions

Sec. Name	Sec. Type	Acquisiton - Disposition	Date	Amount	Price	Amount - 2	Price - 2
Common Stock	Axcelis non-qualified stock option (right to buy)	Disposition	2010-12-09	15,000	$0.00	15,000	$1.16

Remaning Holdings	Exercise Date	Expiration Date	Equity Swap Involved	Transaction Form Type	Transaction Code	Nature of Ownership
135,000	2010-11-16	2019-11-15	No	4	M	Direct

Footnotes

Of the shares held as of December 9, 2010, 16,909 were issuable on vesting of restricted stock units granted the executive under the 2000 Stock Plan and are subject to forfeiture. A portion of these shares will be withheld by the Company on vesting to satisfy tax withholding requirements.
This option is a portion of an option granted on November 16, 2009, which is exercisable as to 25% of the total shares granted on each of the first four anniversaries of the date of grant.